Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics

Prisacaru, Andrian

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dc.contributor.author	Prisacaru, Andrian
dc.date.accessioned	2020-08-25T10:53:25Z
dc.date.available	2020-08-25T10:53:25Z
dc.date.issued	2017-09
dc.identifier.isbn	978-9975-75-901-4
dc.identifier.uri	${dspace.ui.url}/handle/1234567890/404
dc.identifier.uri	http://irek.ase.md:80/xmlui/handle/1234567890/404
dc.description	PRISACARU, Andrian. Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics. In: Competitivitatea şi inovarea în economia cunoaşterii [online]: conf. şt. intern., 22-23 sept., 2017: Culegere de articole. Chişinău: ASEM, 2018, vol. 5, pp. 77-80. E-ISBN 978-9975-75-901-4.	en_US
dc.description.abstract	Although a lot of new materials for micro- and optoelectronics have been elaborated within the last years, silicon remains the principal component of most semiconductor devices and has many industrial uses. Along with electrical and optical properties, mechanical behavior of Si, especially under local loading, obtained a special interest due to its peculiarity for structural phase transformation in nano- or micro-volumes of deformed material. Implementation of modern research techniques of mechanical properties of silicon was investigated in this work. JEL CLASSIFICATION: L63, L94	en_US
dc.language.iso	en	en_US
dc.publisher	ASEM	en_US
dc.subject	nanoindentation	en_US
dc.subject	mechanical properties	en_US
dc.subject	Silicon	en_US
dc.subject	hardness	en_US
dc.title	Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics	en_US
dc.type	Article	en_US