Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics

Abstract

Although a lot of new materials for micro- and optoelectronics have been elaborated within the last years, silicon remains the principal component of most semiconductor devices and has many industrial uses. Along with electrical and optical properties, mechanical behavior of Si, especially under local loading, obtained a special interest due to its peculiarity for structural phase transformation in nano- or micro-volumes of deformed material. Implementation of modern research techniques of mechanical properties of silicon was investigated in this work. JEL CLASSIFICATION: L63, L94