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Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics

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dc.contributor.author Prisacaru, Andrian
dc.date.accessioned 2020-08-25T10:53:25Z
dc.date.available 2020-08-25T10:53:25Z
dc.date.issued 2017-09
dc.identifier.isbn 978-9975-75-901-4
dc.identifier.uri ${dspace.ui.url}/handle/1234567890/404
dc.description PRISACARU, Andrian. Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics. In: Competitivitatea şi inovarea în economia cunoaşterii [online]: conf. şt. intern., 22-23 sept., 2017: Culegere de articole. Chişinău: ASEM, 2018, vol. 5, pp. 77-80. E-ISBN 978-9975-75-901-4. en_US
dc.description.abstract Although a lot of new materials for micro- and optoelectronics have been elaborated within the last years, silicon remains the principal component of most semiconductor devices and has many industrial uses. Along with electrical and optical properties, mechanical behavior of Si, especially under local loading, obtained a special interest due to its peculiarity for structural phase transformation in nano- or micro-volumes of deformed material. Implementation of modern research techniques of mechanical properties of silicon was investigated in this work. JEL CLASSIFICATION: L63, L94 en_US
dc.language.iso en en_US
dc.publisher ASEM en_US
dc.subject nanoindentation en_US
dc.subject mechanical properties en_US
dc.subject Silicon en_US
dc.subject hardness en_US
dc.title Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics en_US
dc.type Article en_US


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